Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope

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Process optimization using the Picoscope

The Pegasus tools were delivered with a set of standard recipes

  • 4 cycles of Process A

  • Recorded with the SPTS software

  • Recorded with the Picoscope

  • 4 cycles of Process D4

  • Recorded with the SPTS software

  • Recorded with the Picoscope


4 cycles of the recipe PrD4 recorded with the Picoscope
4 cycles of the recipe PrD4 recorded with the SPTS software
4 cycles of the recipe Prcocess A recorded with the Picoscope
4 cycles of the recipe PrD4 recorded with the SPTS software
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