LabAdviser/Technology Research

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The aim of this page is to give an overview of the technology research going on in the cleanroom and the other laboratories facilitated by DTU Nanolab. Here technology research projects will be presented. This includes a project description and links to other pages in LabAdviser where the process development outcome from these projects can be found. We urge all our users that do technology research at these facilities to present their activities here. At DTU Nanolab we commit our selves to present the technology research that we initiate to share the outcome with our users, as this is the main purpose for this research.

Presentation Form for Presenting Technology Research:

• Presentation Form

If you perform technology research in the DTU Nanolab facilities, please contribute to this overview page. Start by contacting Berit Herstrøm.

Current Projects - Fabrication

Advanced Nanomachining

• Smoothed advanced silicon NEMS devices - initiated November 2017 - Vy Thi Hoang Nguyen

Biomaterial Microsystems

• Cleanroom fabrication of 3D electrodes with lithography and pyrolysis - Jesper Yue Pan
• Direct laser pyrolysis - Emil Ludvigsen

Silicon Microtechnology

• Microfabrication of X-ray optical elements - initiated February 2017 - Chantal Silvestre

Current Projects - Characterization

Nanostructure and Functionality

• Quantitative electron microscopy of 2D materials - initiated September 2018 - Anton Bay Andersen

Completed Projects - Fabrication

• Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition - initiated November 2013 - Evgeniy Shkondin

Advanced Nanomachining

• Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications - initiated November 2015 - Bingdong Chang

Silicon Microtechnology

• Nanofabrication of Inductive Components for Integrated Power Supply On Chip - initiated November 2014 Hoà Lê Thanh
• Microfabrication of Hard x-ray Lenses - initiated December 2012 - Frederik Stöhr

Completed Projects - Characterization

Nanostructure and Functionality

• Nanoscale characterization of ultra-thin metal films for nanofabrication applications - initiated November 2014 - Matteo Todeschini

Electron Matter Interactions

• Organic Ice Resists for Electron-Beam Lithography - Instrumentation and Processes - initiated November 2014 - William Tiddi