Specific Process Knowledge/Thin film deposition/Deposition of Silver
Silver can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment.
| E-beam evaporation (Alcatel) | E-beam evaporation (Leybold) | |
|---|---|---|
| Batch size |
|
|
| Pre-clean | RF Ar clean | Ar ion bombartment |
| Layer thickness | 10Å to 1µm | 10Å to 0.5µm |
| Deposition rate | 2Å/s to 15Å/s | 1Å/s to 5Å/s |
Thermal deposition of Silver - Process settings for thermal deposition of Silver in Wordentec