LabAdviser

This wiki is the PROCESS HANDBOOK of DTU Danchip. It covers process knowledge to be used in the cleanroom facility of DTU Danchip. The aim of this book is to gather information on processing in the facility. To begin with we aim at entering all the basic processes that are run on the equipments. On a longer term we hope this handbook can be the natural place for Danchip staff and all our cleanroom users to share new process knowledge with each other. This is NOT a book on the theory behind the processes - for that you need to look else where. We should also emphasize that we do not guarantee that you can repeat the results found in this handbook. The information in the book is meant to guide you to good starting points for YOU to further optimize to YOUR needs. LabAdviser

Contents

• Specific Process Knowledge
  • Photolithography
  • Thin film deposition
  • Etch
  • Wafer cleaning
  • Thermal process
  • Imprinting
  • Bonding
  • Back-end processing
  • Characterization
  • E-beam lithography
  • III-V Process
• Projects, Thesis and Articles
• How to add information to LabAdvisor