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1
Descum results
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1.1
Plasma asher 1
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Specific Process Knowledge/Lithography/Descum
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From LabAdviser
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Specific Process Knowledge
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Lithography
Revision as of 11:15, 30 August 2019 by
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Descum results
Plasma asher 1
Settings
Etched Thickness (nm)
ashing time (min)
Recipe
O2 flow
N2 flow
Power
1
2
5
7
10
10
1
70
70
150
14,2
16,3
47,6
123,2
854,3
862,1
2
500
0
200
8,1
32,9
271,1
495,6
446,2
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