Specific Process Knowledge/Thermal Process/Oxidation

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Oxidation

At Danchip we have seven furnaces for thermal oxidation of silicon samples: Boron Drive-in + Pre-dep furnace (A1), Gate Oxide furnace (A2). Phosphorous Drive-in furnace (A3), Anneal-oxide furnace (C1), Anneal-Bond furnace (C3), Al-Anneal furnace (C3), APOX furnace (D1), Noble furnace and Multipurpose Annealing furnace.

Thermal oxidation can take place either by a dry process or a wet process, depending on what furnace that is used for the oxidation. The film quality for a dry oxide is better than the film quality for a wet oxide with regards to density and dielectric constant. However, the oxidation rate is slow for a dry oxide.

Dry oxidation is used for 5 nm - 200 nm of oxide and can be grown in the furnaces: A1, A2, A3, C1, C3, C4, Noble furnace, Multipurpose Annealing
Wet oxidation is used for up to 4 µm of oxide and can be grown in the furnaces: A1, A3, D1.
Very thick oxide layers >4 µm can be grown in D1 by a wet oxidation (only performed by Danchip).

The standard recipes, quality control limits and results for the Boron Drive-in + Pre-dep furnace (A1) and the Phosphorus Drive-in furnace (A3) can be found here:

The wet oxidation rates for the Anneal-Bond furnace (C1) can be found here:

Wet oxidation in Anneal-oxide furnace (C1)

Standard recipes in the oxidation furnaces

The steps in the standard oxidation recipes in the A-stack furnaces (A1, A2 and A3) and the C-stack furnaces (C1, C3 and C4) can be found here:

Specific Process Knowledge/Thermal Process/Oxidation/Standard oxidation recipes

Comparison of the seven oxidation furnaces

	Boron Drive-in + Pre-dep furnace (A1)	Gate Oxide furnace (A2)	Phosphorous Drive-in furnace (A3)	Anneal Oxide furnace (C1)	Anneal Bond furnace (C3)	APOX furnace (D1)	Multipurpose Annealing furnace
Generel description	Dry and wet oxidation. Boron pre-deposition and boron drive-in of boron are also done in the furnace.	Dry oxidation of gate oxide and other very clean oxides.	Dry and wet oxidation. Phosphorous drive-in is also done in the furnace.	Dry and wet oxidation of 100 mm and 150 mm wafers. Oxidation of new wafers without RCA cleaning. Oxidation and annealing of wafers from the LPCVD furnaces and PECVD4.	Dry and wet oxidation and annealing of wafers from Wafer Bonder 02 and from PECVD4 and PECVD3.	Wet oxidation of very thick oxides > 4 µm.	Dry oxidation and annealing of almost all materials.
Oxidation method	Dry: O₂ Wet: Torch	Dry: O₂	Dry: O₂ Wet: Torch	Dry: O₂ Wet: Steamer	Dry: O₂ Wet: Bubbler	Wet: Bubbler	Dry: O₂
Annealing gas	N₂	N₂	N₂	N₂	N₂	N₂	N₂ H₂
Process temperature	900 ^oC - 1150 ^oC	900 ^oC - 1150 ^oC	900 ^oC - 1150 ^oC	900 ^oC - 1100 ^oC	900 ^oC - 1150 ^oC	1075 ^oC	Vacuum: 20 ^oC - 1050 ^oC No vacuum: 20 ^oC - 1100 ^oC
Substrate and batch size	1-30 50 mm wafers 1-30 100 mm wafers	1-30 50 mm wafers 1-30 100 mm wafers	1-30 50 mm wafers 1-30 100 mm wafers	Small samples on a carrier wafer, horizontal 1-30 50 mm wafers 1-30 100 mm wafers 1-30 150 mm wafers	Small samples on a carrier wafer, horizontal 1-30 50 mm wafers 1-30 100 mm wafers	1-150 100 mm wafers	1-30 50 mm, 100 mm or 150 mm wafers 1-50 200 mm wafers Small samples on a carrier wafer, horizontal
Allowed materials	All wafers have to be RCA cleaned, except boron pre-doped wafers from the same furnace.	All wafers have to be RCA cleaned.	All wafers have to be RCA cleaned, except phosphorous pre-doped wafers from furnace A4.	All processed wafers have to be RCA cleaned, except wafers from LPCVD furnaces and PECVD4.	All processed wafers have to be RCA cleaned, except for wafers from Wafer Bonder 02 and from PECVD4 and PECVD3.	Only new wafers	Depends on the furnace quartz set: Metal: Almost all materials, permission is needed Resist pyrolysis

Oxidation curves

Color chart for oxide/nitride thickness

View oxide/nitride color vs thickness/angle

Generic calculator for wet/dry oxide thickness calculation

The following links give an approximate oxide time/thickness based on a general formula:

Know thickness - calculate oxidation time

Know time - calculate oxide thickness

Deal-Grove parameters

By Kasper Reck-Nielsen February 2015

The following table contains linear and parabolic parameters for use in the Deal-Grove model for thermal oxidation. The parameters are obtained a least squares fit to data available in the furnace logbooks. Information on wafer orientation and doping concentration, which is not available in the logbooks, has not been included in calculating the parameters.

	Anneal Oxide			Anneal Bond			Boron Drive-in			Gate Oxide			Phosphor Drive-in
Recipe	B [µm2/h]	B/A [µm/h]	RMSE [nm]	B [µm2/h]	B/A [µm/h]	RMSE [nm]	B [µm2/h]	B/A [µm/h]	RMSE [nm]	B [µm2/h]	B/A [µm/h]	RMSE [nm]	B [µm2/h]	B/A [µm/h]	RMSE [nm]
DRY900	0.000408	0.107	Too little data	0.0660	0.272	31	0.000390	0.154	Too little data	0.0028	0.079	4 (limited data)	0.0507	0.884	Too little data
DRY1000	-	-	-	-	-	-	0.465	0.838	20	-	-	-	0.641	1.45	41
DRY1050	0.0111	0.526	27	-	-	-	0.0129	0.330	8	0.022	0.505	3 (limited data)	0.0134	0.362	6
DRY1100	0.020	0.930	10	-	-	-	0.0212	0.736	23	-	-	-	0.0313	0.553	14
WET950	-	-	-	-		-	0.0716	1.25	12	-	-	-	0.110	1.17	11
WET1000	0.192	1.54	44	-		-	0.192	1.80	29	-	-	-	0.195	2.49	22
WET1050	0.487	0.965	29	0.477	0.899	Too little data	0.455	1.33	16	-	-	-	0.448	1.73	12
WET1100	0.580	1.43	8	-	-	-	0.519	1.186	3	-	-	-	0.403	9.05	7

Wet Oxidation on <100>

The curves below are based on measurements in our specific furnaces and give more accurate results. We will still recommend to make minimum one test run if the thickness is very important.

Wet oxidation
A1 Furnace <100>-Si Wet Oxidation
A3 Furnace <100>-Si Wet Oxidation

Dry Oxidation on <100> and <111> wafer

Dry oxidation
Dry oxide on <100> wafer. The y-axis is in Å and the x-axis is in minutes.
Dry oxide on <111> wafer. The y-axis is in Å and the x-axis is in minutes.