The Dry Etch TPT
DTU Nanolab offers a Tool Package Training in dry etching; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.
The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's.
| Dry Etch Tool Package Training
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| Schedule
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Theoretical part
- A 3-hour lecture. The lecture is on videos. the videos can be found on YouTube, see link below. You can also find the slides with notes below. It can be helpful to print out the lecture slide for your notes and questions while watching the videos. After seeing the videos you must attend a Question&Evaluation session (1-1½ hour), max. 3 persons per session, Please sign up via: Dry Etch TPT Lecture doodle. The Question&Evaluation session takes place in room: 347-078
Practical part
- A 2 hour training session, max. 3 persons per session will be planed after the Question&Evaluation session.
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| Location
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Theoretical part (the question&evaluation session)
Practical part
- The training session takes place inside the cleanroom. The meeting point will be in The gowning area.
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| Qualified Prerequisites
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- Cleanroom safety course at DTU Nanolab
- Admission to the cleanroom must be obtained before the training session
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| Preparations
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Before the Question&Evaluation session
- Watch the lecture videos, see link to the videos below.
- If you are not familiar with dry etching we advice you to read through the "Lecture slides with explanatory text included" File:TPT Dry etching April2018 with notes.pdf before watching the videos.
Before training session
- Watch the training video: TPT hands-on intro
- Watch the screen cast video's for the ASE/AOE software
- Watch the screen cast video's for the DRIE/ICP metal and III-V ICP
These are on YouTube and you can find a link to the videos below
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| Course Responsible
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The Dry Etch Group at DTU Nanolab
- Jonas Michael-Lindhard
- Berit Herstrøm
If you have questions you can contact us by e-mailing dryetch@danchip.dtu.dk.
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| Learning Objectives
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- Know why and when to use dry etching
- Use the dry etchers without harming the machines
- Select the right instrument to use for his/her dry etch processing
- Select an appropriate etch recipe for his/her dry etch processing
- Spot when the recipe needs to be tuned for his/her needs and
- Suggest relevant tuning parameters
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Material for preparations and further information
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Literature
- No extra Literature at the moment
Slides from Lecture
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Lecture videos
(Watch before the question and evaluation session)
Pre hands-on training videos
(Watch before the hands-on training)
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