Specific Process Knowledge/Thin film deposition/Si sputter in Wordentec

Silicon sputter

Silicon can be sputter deposited in Wordentec.

Parameters

Listed below are tried parameters, that can be used during deposition. The process parameters in the table below can be used as started values, run a test process to be sure that you get the right thickness.

Please don´t use higher power than 180W, since the target then could break into a lot of small pieces.

	Settings 1	Settings 2
Process type	Sputtering	Sputtering
Power	130W	170W
Sputter pressure	5*10-3 mbar	1*10-2 mbar
Rate	About 0.7 Å/s	About 0.6 Å/s