Specific Process Knowledge/Characterization/Four-Point Probe
Four-Point Probe
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There are two four point probes at Nanolab. Four point probe from Jandel is located inside the cleanroom(D-3) and Four-Point Probe from Veeco is now located in the basement(346-904).
The Four point probe is manufactured by Jandel Engineering Limited and using Jandel probe head and the RM3000+ Test Unit which can supply constant current between 10nA and 99.99mA, and measure voltage from 0.01mV to 1250mV.
For sheet resistance measurements, the quoted range is 1 milliohm/square to 5x108 ohms/square. Measurements outside this range are possible but with possible reduced accuracy. For volume (bulk) resistivity measurements, the quoted range is 1 milliohm.cm to 1x106 ohm.cm. Measurements outside of this range may be possible but will depend on sample type e.g. whether the sample is a thin layer.
Multiposition Probe stand can measure on wafers up to 200mm diameter. The Θ movement clicks in four positions at 90 degrees and the linear movement in up to 10 positions giving repeat placement accuracy of +/- 1mm.
The Four-Point Probe is a Veeco FPP-5000 for I/V measurement. The main purpose is to measure resistance and resistivity on a 4" silicon wafer. But can also be used to find thickness of thin layers or test if is a N- or P-type wafer.
It works only for 4" wafers because a special holder is need.
The user manual, technical information and contact information can be found in LabManager:
| Purpose | Resistance and resistivity measurement | |
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| Process parameter range | Process Temperature |
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| Process pressure |
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| Substrates | Batch size |
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| Substrate material allowed |
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