Specific Process Knowledge/Characterization

Choose topic

• Surface imaging
• Topographic measurement
• Stress measurement
• Filmthickness measurement
• Element analysis
• Measurement of optical constants
• Hydrophobicity measurement
• Resistivity measurement
• Wafer thickness measurement

Choose equipment

SEM: Scanning Electron Microscopy

• FEI SEM
• JEOL SEM
• LEO SEM

AFM: Atomic Force Microscopy

• Nanoman - AFM - can be used for nanomanipulation

Profiler

• Dektak 8 stylus profiler
• Tencor

Optical characterization

• Ellipsometer
• Filmtek
• Prism Coupler

SIMS: Secondary Ion Mass Spectrometry

• Atomika SIMS