Specific Process Knowledge/Etch/DRIE-Pegasus/ProcessA/ProcessLog

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End date User line noProcessingDone [text] Etched material [list+] Mask material [list+] Recipe [text] Wafer ID [text] Process time [m] Process time [s] Process time [hh:mm:ss calc] Chiller temperature [°C] Comments [text]
02-05-2016 14:50 jmli 1 None None HiLi10mins none 10 0 00:10:00 0
02-05-2016 14:50 jmli 2 4" Si Az 4562 PrA-0 C03991.01 14 40 00:14:40 20 Travka20 wafer, 80cyc step2;
02-05-2016 14:50 jmli 3 None None 3min TDESC clean none 3 0 00:03:00 0
02-05-2016 14:50 jmli 4 4" Si Az 4562 PrA-1 C03991.02 14 0 00:14:00 20 Travka20 wafer, 80cyc step2;
02-05-2016 14:50 jmli 5 None None HiLi10mins none 10 0 00:10:00 0
02-05-2016 14:50 jmli 6 4" Si Az 4562 PrA-2 C03991.03 14 40 00:14:40 20 Travka20 wafer, 80cyc step2;
02-05-2016 14:50 jmli 7 None None 3min TDESC clean none 3 0 00:03:00 0
02-05-2016 14:50 jmli 8 4" Si Az 4562 PrA-0 C03991.04 14 40 00:14:40 20 Travka20 wafer, 80cyc step2;
02-05-2016 14:50 jmli 9 None None 3min TDESC clean none 3 0 00:03:00 0
02-05-2016 14:50 jmli 10 4" Si Az 4562 PrA-1 C03991.05 14 0 00:14:00 20 Travka20 wafer, 80cyc step2;
02-05-2016 14:50 jmli 11 None None 3min TDESC clean none 3 0 00:03:00 0
02-05-2016 14:50 jmli 12 4" Si Az 4562 PrA-2 C03991.06 14 40 00:14:40 20 Travka20 wafer, 80cyc step2;
02-05-2016 14:50 jmli 13 None None HiLi10mins none 10 0 00:10:00 0
03-06-2016 14:47 jmli 1 None None 3min TDESC clean none 3 0 00:03:00 20
03-06-2016 14:47 jmli 2 Si Az Mir 701 PrA-0 C04047.01 14 40 00:14:40 20 travka20 wafer
03-06-2016 14:47 jmli 3 None None 3min TDESC clean none 3 0 00:03:00 20
03-06-2016 14:47 jmli 4 Si Az Mir 701 PrA-1 C04047.02 14 40 00:14:40 20 travka20 wafer
03-06-2016 14:47 jmli 5 None None 3min TDESC clean none 3 0 00:03:00 20
03-06-2016 14:47 jmli 6 Si Az Mir 701 PrA-2 C04047.03 14 40 00:14:40 20 travka20 wafer
03-06-2016 14:47 jmli 7 None None 3min TDESC clean none 3 0 00:03:00 20
03-06-2016 14:47 jmli 8 Si Az Mir 701 PrA-0 C04047.04 14 40 00:14:40 20 travka20 wafer
03-06-2016 14:47 jmli 9 None None 3min TDESC clean none 3 0 00:03:00 20
03-06-2016 14:47 jmli 10 Si Az Mir 701 PrA-1 C04047.05 14 40 00:14:40 20 travka20 wafer
03-06-2016 14:47 jmli 11 None None 3min TDESC clean none 3 0 00:03:00 20
03-06-2016 14:47 jmli 12 Si Az Mir 701 PrA-2 C04047.06 14 40 00:14:40 20 travka20 wafer
03-06-2016 14:47 jmli 13 None None 3min TDESC clean none 3 0 00:03:00 20
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