Specific Process Knowledge/Characterization/XRD
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XRD SmartLab
The Rigaku SmartLab is an advanced XRD for measuring on thin films. All thin films can be measured without fixating the sample, as the system has a so called In-Plane arm.
The user manual(s), user APV(s), technical information, and contact information can be found in LabManager:
Process information
Software for analysis
The software packages used for data analysis are available on the equipment computer, but we recommend that you install it on your personal computer. To run the software you need a USB dongle with a license on, these can be borrowed from Rebecca and Kristian in room 347-077. We only have 9 dongles available, so when you are done please return the dongle to danchip.
The software can be found on "CleanroomDrive\_Equipment\XRD\Rigaku software\RILauncher", it should be possible to install the software without a dongle. To use the software you have to log in. The user is: Administrator. There is no password.
| Equipment | XRD SmartLab | |
|---|---|---|
| Purpose | Crystal structure analysis and thin film thickness measurement |
|
| X-ray generator |
Maximum rated output |
3 kW |
|
Rated tube voltage |
20 to 45 kV | |
|
Rated tube current |
2 to 60 mA | |
|
Type |
Sealed tube | |
|
Target |
Cu | |
|
Focus size |
0.4x8 mm (Line/Point) | |
| Goniometer |
Scanning mode |
incident / receiver coupled or independent |
|
Goniomenter radius |
300 mm | |
|
Minimum step size |
0.0001° (0.36") | |
|
Sample stage |
χ:-5~+95° φ:0~360° Z:-4~+1 mm X,Y:±50 mm for a 100 mm wafer Rx,Ry:-5~+5° | |
|
Sample size |
Diameter: 150 mm Thickness: 0~21 mm | |
| Optics | Incident side |
|
| Receiver side |
| |
| Substrates | Substrate size |
up to 150 mm wafers |
| Allowed materials |
All materials | |