Specific Process Knowledge/Characterization/Hardness measurement

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Hardness tester

Hardness tester. Positioned in cleanroom F-2

The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into sample using a know indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the large the indentation).

The user manual, technical information and contact information can be found in LabManager:

Hardness tester

Quality Control - Recipe Parameters and Limits

Quality Control (QC) for the hardness tester

The measured standard hardnesses are 2xx HV, 4xx HV and 6xx HV. The QC is performed x times a year. The QC procedure

Equipment performance and process related parameters

Purpose	Hardness tester	Sample hardness Film hardness
Performance	Indent force	0,05N 0,15N
Substrates	Batch size	One sample
	Substrate materials allowed	No restrictions (besides sample must be dry and free from chemical residues)