Specific Process Knowledge/Characterization/Thickness Measurer

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Thickness measurer

Hardness Measurer. Positioned in cleanroom F-2

The purpose is to measure hardness of samples or films.


The user manual, technical information and contact information can be found in LabManager:

Hardness measurer

Quality Control - Recipe Parameters and Limits

Quality Control (QC) for the Thickness measurer

The measured standard thickness is 0.1 mm. The QC is performed x times a year.


Equipment performance and process related parameters

Purpose

Thickness measurer

  • Wafer thickness
  • Depths of larger grooves
  • Heigth of larger mesas

Performance

Thickness resolution

  • < 5 µm

Substrates

Batch size

  • One sample
Substrate materials allowed
  • No restrictions