Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/KPFM
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KPFM (Kelvin Probe Force Microscopy) measurements can be done with this AFM Icon. It is best for mapping the surface potential on a sample with nanometer resolution but it can also be calibrated to give quantitative values.
Here I shortly explain how to calibrate to get work function values:
To get a quantitative value for the work function of a sample material you need to calibrate the AFM tip you are using. This is done by measuring a material with a known work function. We do not have a certified sample for this but we are using a sample that came with the system. it has some lines of Au-Si-Al right next to each other.