Specific Process Knowledge/Characterization/Probe station
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Revision as of 13:14, 21 September 2017 by Rkch (talk | contribs) (→Equipment performance and process related parameters)
Probe station
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The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc, it has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected.
It has several source meters, multi meters and a computer attached.
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Purpose |
Electrical measurements |
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|---|---|---|
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Performance |
Pad size |
|
|
Substrates |
Batch size |
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| Substrate materials allowed |
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The user manual, technical information and contact information can be found in LabManager: