We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside. Below you can see the courses that are presently running. The "Cleanroom introduction Course" is mandatory for all users that need to enter the cleanroom facility on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.
The Cleanroom Introduction Course
For information regarding the Introduction Course, please take a look at the DTU Danchip homepage, a direct link is given here: [1]
The Lithography TPT
DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.
The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
Lithography Tool Package Training
Schedule
Theoretical part
The lecture has been replaced by videos that can be viewed at one's leisure.
A 1 hour "questions and exercises" session once or twice a month will be planned as needed (typically Fridays 09:30-10:30).
Be able to manipulate shapes in different ways (merge, intersect, XOR, subtract, invert, move, scale, rotate, mirror, grow/shrink, duplicate, align etc.)
use mask layers for a process
organize a hierarchical mask design
choose mask polarity and orientation for different resist types and Front/Back-side alignment
discuss tolerances related to mask design/process flows
distinguish between critical/non-critical process/mask steps
design appropriate test structures for a process
select appropriate alignment marks for a process
make a chip/wafer layout usable for dicing
export the layout to cif or gds files with appropriate layer names
DTU Danchip offers a Tool Package Training in Dry etching; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.
The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's.
Dry Etch Tool Package Training
Schedule
Theoretical part
A 3-hour lecture. The next 3 hour lecture is on the 21st of September from 9:00 to approximately 12. Sign up via: Dry Etch TPT Lecture doodle
Practical part
A 2-3 hour training session, max. 3 persons per session will be planed after the lecture
Location
Theoretical part
The location of the lecture will be notified after you have signed up
Practical part
The training session takes place inside the cleanroom. The meeting point will be in The gowning area
Qualified Prerequisites
Cleanroom safety course at DTU Danchip
Admission to the cleanroom must be obtained before the training session
DTU Danchip offers a Tool Package Training in Scanning electron microscope (SEM); the course includes theory on SEM, as well as training in instrument operation.
The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Danchip.
SEM Tool Package Training
Schedule
Theoretical part
A 3-hour lecture. The next two 3 hour lectures are on the 14th and 28th of April from 9:00 to approximately 12.00.
Practical part
A 2-hour training session, max. 3 persons per session will be planed after the lecture
A 2-hour one-on-one hands-on session which will request the participant to pass a “driving test” on the SEM. In this session, the participant will have the opportunity to study their own sample
Location
Theoretical part
The location of the lecture will be notified after you have signed up
Practical part
The training session takes place building 346 room 907(basement). The meeting point will be at the SEM Supra 1
Qualified Prerequisites
Preparations
Before the lecture
Read “Scanning Electron Microscopy Primer” by Bob Hafner and some notes that lists some differences between the SEMs described in the primer and the SEMs at Danchip. You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Learning material, or the primer can be found here
Before the first group training session
Watch the training videos: You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Training videos (will be the Link to the video later)
Watch the training videos: You can find it on the cleanroom drive: [U:\DCH\CleanroomDrive\_TPT\TPT SEM\Training videos] (will be the Link to the video later)
