Specific Process Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide

The Nikon Eclipse L200 series mikroscopes can do an autoscan of wafers to image the entire wafer.

This mini guide shows one way of setting this up. This guide is setup for a full waferscan of a 6" wafer -which takes app. 4-6 hours to scan, it gives app. 5000 images of 3-4MB each (at 10x Objective) hence it fills a lot of storage. It is recommended to store the data on the temporary folder in the C-drive and move the images (eg. to cleanroom drive) as soon as possible or risk it getting deleted. It requires a macro to run, Danchip have a template by courtesy of "Bjarke Sørensen Jessen", however Bjarke will not be available to help everyone, and it is therefore at your own risk, and any disclamer or issues should be addressed to Danchip, that will provide support and or decide how to proceed.

procedure

login to the microscope, place sample on stage, open NIS-elements software USB version to activate camera
- If backside illumination is needed click DIA on microscope and do not place a tissue underneath sample
Click "Devices", "Manage Devices" - disable z-drive (to minimize risk of destroying the objectives) - close "Devices", click "Initialize stage"
Click "Devices", "Manage Devices" - enable z-drive again - close "Devices"
Press F11: DS fill settings needed, click "commands", "Save/Load settings"
Use the 5x objective to look at the flat, and adjust the rotation of the sample by correcting the sample according to the rotation on screen (over the full flat)
Open the macro -can be found here: xxx
Manually scan the wafer with the 5x objective and find the middle of the right/left edge, the middle is with no curvature
- In lower right corner of the screen x-axis and Y-axis are denoted in mm.
- Write the Y-axis value in the macro under Y-center: but in um - this value is the Y-axis center (Y=0!)
Repeat the process for the x-coordinate by using the top of the wafer (due to flat) to find middle, which is X-axis center and punch this value in the macro at X-center:
In the macro set images between auto focus under "focost =10" - 10 is a good average, so it does not take to long and also not go out of focus.
Save the macro - give it a new name and place in your folder
Click "Devices", "Autofocus setup": Step: 10, range 100um click "test" to see the motor is working, click "Save and Close"
Click "file", "save next options": give your images a name under: Prefix, select location at: eg. C:\Temp2, nuber the images as: Next file: 0, click "Apply"
Change to objective 10x
To get very uniform images that can be used to compare processes, before and after make the setting on the microscope similar:
- Turn the lamp all the way down, click "Settings" "load/save" if you have a old setting file otherwise save setting where you can find it with thee settings: aperture shutter on, gain off (1x)
Click "Macro", "Run from" select your macro and the scanning will start

take a tissue and write Initials, scanning in process do not touch, endtime: xx/duration 4h from:XX and place it on the keybord or on the stage (wihout covering your sample)

Remember to remove/delete your images as soon as possible, since this can limit the next user in making a full waferscan due to storage limitaions!

Danchip master macro, should not be changed, but can be copied and moved somewhere where users can access it, is located here: O:\CleanroomDrive\_Equipment\Nikon Eclipse L200 There is also an untouched version of the macro at TANAMP and LGPE cleanroom folders called: 6inchWaferScan - v2.mac as a second backup!