Specific Process Knowledge/Lithography/NanoImprintLithography
Imprinter 01
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The Imprinter 01 is a system for imprinting in polymers. 2 different types of imprinting can be done: Hot embossing and flash imprint. It is not possible to align the wafers one wishes to imprint (except by eye).
The user manual, user APV, and contact information can be found in LabManager
Purpose |
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Performance | Alignment accuracy |
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Process parameter range | Process Temperature |
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Process pressure |
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Imprint Pressure |
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Substrates | Batch size |
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Substrate material allowed |
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Material allowed on the substrate |
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