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Courses

We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside. Below you can see the courses that are presently running. The "Cleanroom introduction Course" is mandatory for all users that need to enter the cleanroom facility on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.

The Cleanroom Introduction Course

For information regarding the Introduction Course, please take a look at the DTU Danchip homepage, a direct link is given here: [1]

The Lithography TPT

DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.

The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.

Lithography Tool Package Training
Schedule	Theoretical part The lecture has been replaced by videos that can be viewed at one's leisure. A 1 hour "questions and exercises" session once or twice a month will be planned as needed (typically Fridays 09:30-10:30). NEXT "questions and exercises" sessions: 21st of April, 28th of April, 19th of May Practical part A 4-5 hour training session 2-3 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 14:00). NEXT training sessions: 26th of April, 3rd of May, 24th of May
Location	Theoretical part The location of the "questions and exercises" session will be specified after signing up for the course. Practical part The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.
Qualified Prerequisites	Cleanroom safety course at DTU Danchip Admission to the cleanroom must be obtained before the training session
Preparations	Before the "questions and exercises" session Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus) Watch the lecture videos (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos. Before training session Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic). Study the equipment manuals. The manuals are available in LabManager. Study the TPT process flows (first print, and alignment). Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the section below.
Course Responsible	The Lithography Group at DTU Danchip. Sign up for the course by e-mailing to lithography@danchip.dtu.dk.
Learning Objectives	Describe fundamental parts of lithographic processing in a cleanroom, design of process flows Authorization to use spin coater, mask aligner, and developer at DTU Danchip Calculate relevant process parameters Analyze and apply your results of lithographic processing

Material for preparations and further information

Literature

Lecture videos

Lecture videos (7 videos, 2:41 hours in total)

Slides from Lecture

Training videos

Manuals

Automatic Spin Coater: Spin Coater: Gamma UV
UV Mask Aligner: Aligner: MA6 - 2 or KS Aligner
Automatic Puddle Developer: Developer: TMAH UV-lithography

Process Flows

The Dry Etch TPT

DTU Danchip offers a Tool Package Training in Dry etching; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.

The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's.

Dry Etch Tool Package Training
Schedule	Theoretical part A 3-hour lecture. The next 3 hour lecture is on the 31st of May from 9:00 to approximately 12. Practical part A 2-3 hour training session, max. 3 persons per session will be planed after the lecture
Location	Theoretical part The location of the lecture will be notified after you have signed up Practical part The training session takes place inside the cleanroom. The meeting point will be in The gowning area
Qualified Prerequisites	Cleanroom safety course at DTU Danchip Admission to the cleanroom must be obtained before the training session
Preparations	Before the lecture Watch the video:Introduction to Dry Etch Equipment Before training session Watch the training video: TPT hands-on intro Watch the screen cast video's for the ASE/AOE software:See below Watch the screen cast video's for the DRIE/ICP meat and III-V ICP: See below
Course Responsible	The Dry Etch Group at DTU Danchip. Sign up for the course by e-mailing to dryetch@danchip.dtu.dk.
Learning Objectives	Know why and when to use dry etching Use the dry etchers without harming the machines Select the right instrument to use for his/her dry etch processing Select an appropriate etch recipe for his/her dry etch processing Spot when the recipe needs to be tuned for his/her needs and Suggest relevant tuning parameters

Material for preparations and further information

Literature

No extra Literature at the moment

Pre Lecture video

Introduction to Dry Etch Equipment 5min37s

Slides from Lecture

Lecture slide show Media:TPT Dry etching 20170223.pptx
Lecture slides with explanatory text included Media:TPT Dry etching with notes 20170223.pdf

Pre hands-on training videos

TPT hands-on intro 6min6s

Screen cast videos for the DRIE, ICP metal and III-V ICP:

Screen cast videos for the ASE and AOE:

The SEM TPT

DTU Danchip offers a Tool Package Training in Scanning electron microscope (SEM); the course includes theory on SEM, as well as training in instrument operation.

The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Danchip.

SEM Tool Package Training
Schedule	Theoretical part A 3-hour lecture. The next 3 hour lecture is on the 27th of April from 9:00 to approximately 12. Practical part A 2-hour training session, max. 3 persons per session will be planed after the lecture A 2-hour one-on-one hands-on session which will request the participant to pass a “driving test” on the SEM. In this session, the participant will have the opportunity to study their own sample
Location	Theoretical part The location of the lecture will be notified after you have signed up Practical part The training session takes place building 346 room 907(basement). The meeting point will be at the SEM Supra 1
Qualified Prerequisites
Preparations	Before the lecture Read “Scanning Electron Microscopy Primer” by Bob Hafner and some notes that lists some differences between the SEMs described in the primer and the SEMs at Danchip. You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Learning material, or the primer can be found here Before the first group training session Watch the training videos: You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Training videos (will be the Link to the video later) Before the one-on-one hands-on Look at the presentation Media:Operating_SEM_Supra_1_final.pptx Read the user manual for SEM Supra 1 Click here
Course Responsible	The SEM Group at DTU Danchip (SEM@danchip.dtu.dk). Sign up for the course by e-mailing to sem@danchip.dtu.dk.
Learning Objectives	Prepare samples and safely operate SEM Understand possibilities and limitations of SEM Explain SEM electron optics and detectors Optimize and analyse SEM images

Material for preparations and further information

Slides from Lecture

Lecture slide show Media:Danchip_SEM_lecture.pptx