Specific Process Knowledge/Characterization/SEM Tabletop 1

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SEM Tabletop 1 located in basement 346-904

SEM Supra 1

The SEM Tabletop 1 Is a scanning electron microscope. It produces enlarged images of a variety of specimens. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.

The SEM is very fast and easy to use. Sample loading can be done fast and easy. It is not needed to perform much optimization in order to obtain good SEM images.

However, it has a limited resolution compared to the other SEMs at Danchip, but for inspection of samples with structures in the micrometer range it is very fast and easy to use.

Many sample materials are allowed in the this SEM, including all standard cleanroom materials and some biological samples

The stage can be moved manually in the X and Y directions by turning two knobs in the

The SEM can be operated in different pressure modes: Conductor, standard and charge-up reduction. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Thus the charge-up reduction mode makes it possible to obtain SEM images of most samples including non-conducting samples without much sample preparation.

The SEM is equipped with two detectors: A secondary electron (SE) detector and a backscatter (BSE) detector.

The SEM is the training SEM at DTU Danchip. It means that all new SEM users with no or little SEM experience must be trained on this tool and gain basic knowledge here before being qualified for training on other SEM's.

The SEM Tabletop 1 was installed at Danchip in January 2017.

cleanroom before SEM inspection.

The Balzer Sputter is located in the same room as the SEM Supra 1 and can be used to cover samples (for instance polymer samples from the Polymer Injection Molding tool) with a thin gold layer before SEM inspection to avoid charging problems.

Only users with samples that are somehow related to the cleanroom can use this SEM. Other users will have to contact DTU CEN.

The user manual, control instruction, the user APV and contact information can be found in LabManager:

SEM Supra 1 info page in LabManager,

Performance information

• SEM comparison page

Equipment performance

Equipment		SEM Supra 1 (Supra 40VP SEM)
Purpose	Imaging and measurement of	Conducting samples Semi-conducting samples Thin (~ 5 µm <) layers of non-conducting materials such as polymers Thick polymers, glass or quartz samples
Location		Basement of DTU Danchip
Performance	Resolution	1-2 nm (limited by vibrations) The resolution is strongly dependent on the type of sample and the skills of the operator.
Instrument specifics	Detectors	Secondary electron (Se2) Inlens secondary electron (Inlens) 4 Quadrant Backscatter electron (QBSD) Variable pressure secondary electron (VPSE)
	Stage	X, Y: 130 × 130 mm T: -4 to 70o R: 360o Z: 50 mm
	Electron source	FEG (Field Emission Gun) source
	Operating pressures	Fixed at High vacuum (2 × 10-4mbar - 10-6mbar) Variable at Low vacuum (0.1 mbar - 2 mbar)
	Options	All software options available
Substrates	Batch size	Up to 6" wafer with full view
	Allowed materials	Any standard cleanroom material and samples from the Laser Micromachining tool and the Polymer Injection Molding tool