Specific Process Knowledge/Characterization/Four-Point Probe

Four-Point Probe

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The Four-Point Probe is a Veeco FPP-5000 for I/V measurement. The main purpose is to measure resistance and resistivity on a 4" silicon wafer. But can also be used to find thickness of thin layers or test if is a N- or P-type wafer.

The wafer are pushed down on the four pins so a measurement is performed. It works only for 4" wafers because a special holder is need.

Four point probe: positioned in cleanroom D-3

The user manual, technical information and contact information can be found in LabManager:

Four point probe

Overview of the performance of the Four-Point Probe and some process related parameters

Purpose		Resistance and resistivity measurement
Process parameter range	Process Temperature	Room temperature
	Process pressure	1 atm
Substrates	Batch size	1 4" wafer per measurement 1 6" wafer per measurement
	Substrate material allowed	Silicon wafers