LabAdviser/314/Microscopy 314-307/SEM/QFEG

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DTU Cen's Quanta FEG positioned in building 307 room no. xx

The FEI Quanta 200 ESEM FEG is a field emission scanning electron microscope with a spatial resolution of 2 nm for the ETD detector in high vacuum at 30 keV. The microscope can operate in several modes, such as high vacuum, low vacuum, environmental mode, room temperature, low temperature and cryo. Our Quanta FEG is fitted with an EDS detector, which allows for analytical measurements in all the operation modes.

Process information

Electron source

Field emission gun

Accelerating voltage

500 V- 30 kV

Resolution

2 nm at 30 kV (SE)

Imaging detectors

Everhart-Thornley (SE/BSE), Solid State BSE, Large Field, Gaseous SE, Gaseous BSE, Gaseous Analytical, STEM, vCD and CCD Camera

Imaging modes

High, low vacuum and environmental

Analytical capabilities

Energy dispersive X-rays (Oxford Instruments 80 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV)

Attachments

Quorum PP2000 Cryo System, FEI Peltier stage (-10°C to 22°C).

Equipment performance and process related parameters

Equipment		FEI Quanta 200 FEG ESEM
Purpose	Vizualization and Microanalysis	Vizualization of surfaces (topography and Z contrast) Vizualization of projected image (BF STEM image) Energy Dispersive X-ray analysis
Performance	Resolution	The resolution of Quanta FEG dependends on the sample and the operation mode!
Performance	Resolution	2 nm at 30 keV for Au on C sample with the ETD detector
Instrument specifics	Detectors	ETD- Everhart-Thornley for secondary electrons BSD- Solid state Back Scattered Detector LFD- Large Field Detector for secondary electrons GSED- Gaseous Secondary Electron Detector GBSD- Gaseous Backscattered Electron Detector GAD- Gaseous Analystical Detector STEM- right field Scanning Tramission Electron detector vCD- low voltage BSED CCD camera
	Electron source	Field Emission - Tungsten filament
	Stage (room temperature)	X, Y: 25 × 25 mm T: 0 to 60^o (Full tilt require removment of cryo cold trap.) R: 360^o
	Peltier stage	FEI Peltier stage -10^o to 22^o
	Cryo stage	Quorum PP2000 Cryo System
	EDS	Oxford Instruments 80 mm² X-Max silicon drift detector, MnKα resolution at 124 eV
	Operating pressures	High vacuum (10^-4 Pa), Low vacuum and Enviromental mode (up to 2700Pa)
Substrates	Sample sizes	No actual limit (limitted by stage movment and detector position).
	Allowed materials	Conducttors, Semiconductors,Insulators,Wet Samples, Biological (not pathogents!)