Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/isotropic/isoslow1
| Date | Substrate Information | Process Information | SEM Images | ||||||
|---|---|---|---|---|---|---|---|---|---|
| Wafer info | Mask | Material/ Exposed area | Tool / Operator | Conditioning | Recipe | Wafer ID | Comments | ||
| 9/9-2014 | 6" First DUV box wafer | standard stepper mask (50 nm barc + 320 nm krf) | Si / 50%+ | ICP Metal Etch / jmli | 2*30 sec barc etch using 'slow etch with carrier' | isoslow1 , 2:00 minutes | S005292 |
| |
