Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/mediumiso1

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Process runs
Date Substrate Information Process Information SEM Images
Wafer info Mask Material/ Exposed area Tool / Operator Conditioning Recipe Wafer ID Comments
9/4-2014 4" travka05 wafer 1.5 µm AZ Si / 5 % Pegasus/jmli 5 minute TDESC clean + MU runs jml/isotropic/mediumiso1 2:00 minutes S003961

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