Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic

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Mediumiso
Recipe Step Temp. Deposition step Etch step Process observations
Time Pres. C4F8 SF6 O2 Coil Time Pres. C4F8 SF6 O2 Coil Platen HW Runs Key words
mediumiso1 - 20 NA NA NA NA NA NA NA 25 0 150 0 600 3 - 1 NA
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