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Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers

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< Specific Process Knowledge‎ | Thin film deposition‎ | ALD Picosun R200

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This page describes non standart recipes including multilayers structures.

Low temperature deposition of Al₂O₃

Recipe: Al2O3LT

Temperature:80-150C

Low temperature deposition of TiO₂

Recipe: TiO2LT

Temperature: 80-150C

Flat Low temperature grown multilayers

Recipe: EMA01 Recipe: EMA02 Recipe: EMA03 Recipe: EMA04

Temperature: 120C

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