Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/Lasers sources

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Laser sources

The laser micromachining tool is equipped with two laser sources (1) picosecond laser (TBW) and (2) a nanosecond laser (IPG). The technical specification provided by the supplier 3D micromac are shown below.

Specifications from 3D micromac

Picosecond (TBW) Nanosecond (IPG)
Wavelength 1064nm, 532nm, 355nm 1064nm
Pulse duration 10ps 120ns
Repetition rate 200 kHz up to 8000 kHz software controlled 200kHz
Output power > 50 W @ 1064 nm 100 W
Warm-up time 25min none