Specific Process Knowledge/Thermal Process/Furnace: Multipurpose annealing/Acceptance test
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Recipe: "vr_dryOx_1000C_120min_150_5Wafer_D1_mit_Inliner_oPurgering.ATV"
Oxidation time: 80 min Oxidation temperature: 1050 oC O2 flow: 1 slm
The oxidation has been done with 150 mm wafer, and with 30 wafers in the furnace.
Wafer 4 (towards the door), wafer 16 and wafer 28 (towards the service area) were measured.
The acceptance for the Multipurpose Anneal furnace was performed in November 2014 by ATV Technologie.