Specific Process Knowledge/Etch/ICP Metal Etcher/Barc Etch

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Barc Etch

Etching barc with a dedicated recipe for barc etching is a good idea if you are on the limit of having enough DUV resist mask to reach etch depth you need.Here is an example of a barc etch I have started testing.

Parameter Barc etch with CF4
Coil power 800W
Platen power 100W
Pressure 3 mTorr
Flow rate CF4 4 sccm
Flow rate H2 20sccm


Parameter Results
Etch rate in barc 52nm in 30s [bghe 20150519]
Etch rate in KRF resist 27 nm in 30s [bghe 20150519]
Selectivity KRF:Barc 1:2
Etch 65nm barc Use 40-45s