Specific Process Knowledge/Characterization/Sample preparation
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An overview of the performance of the AFM: Nanoman
| Equipment | Nanoman | |
|---|---|---|
| Purpose | Topografic measurement in the nanometer and and sub-micrometer regime |
|
| Performance | Scan range xy | Up to 90 µm square |
| Scan range z | 1 µm (can go up to 6µm with special settings) | |
| Resolution xy | Down to 1.4 nm - accuracy better than 2% | |
| Resolution z | <1 Å - accuracy better than 2% | |
| Max. scan depth as a function of trench width W | ~1 for our standard probe. Can be improved to about 10 with the right probe | |
| Hardware settings | Tip radius of curvature | Standard probe: <12 nm |
| Standard Cantilevers/tips | Tap300Al-G | |
| Super Sharp Si Cantilever/tip | SSS-NCHR | |
| High Aspect Ratio Cantilever/tip | AR5-NCHR | |
| Cantilevers/tips vendor | www.nanoandmore.com | |
| Substrates | Substrate size | Up to 6" |
| Substrate material allowed | In principle all materials | |