File:Rs AmorBor vs PolyBor .png
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Sheet resistance on Boron doped poly-si using "POLYBOR" recipe, deposition time : 30 minutes, B2H6 flow at 7 sccm and 30 sccm, anneal : 950C 1 hour and Boron doped a-Si using "AMORBOR" recipe, Deposition time : 75 minutes, B2H6 flow at 7sccm, anneal: 950C 1hour. (Result from Trine H. Christensen DTU Space)
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 09:30, 19 February 2015 | | 1,172 × 951 (28 KB) | Paphol (talk | contribs) | Sheet resistance on Boron doped poly-si using "POLYBOR" recipe, deposition time : 30 minutes, B2H6 flow at 7 sccm and 30 sccm, anneal : 950C 1 hour and Boron doped a-Si using "AMORBOR" recipe, Deposition time : 75 minutes, B2H6 flow at 7sccm, anneal: 9... |
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