Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/SIMS settings

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< Specific Process Knowledge‎ | Etch‎ | IBE⁄IBSD Ionfab 300
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IBSD setting for different materials
  Lower plate Upper plate
Ti -1
Si -1 (2)
Al -1 1
Cr -1
Ni -6
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