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Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/SIMS settings

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< Specific Process Knowledge | Etch | IBE⁄IBSD Ionfab 300
Revision as of 11:05, 12 December 2014 by Bghe (talk | contribs) (Created page with "{| border="1" style="text-align: center; width: 320px; height: 200px;" |- |colspan="3" style="text-align: center;" style="background: #efefef;" | '''IBSD setting for differen...")
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IBSD setting for different materials
  Lower plate Upper plate
Ti -1
Si -1 (2)
Al -1 1
Cr -1
Ni -6
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