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Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange

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< Specific Process Knowledge‎ | Etch‎ | DRIE-Pegasus

Revision as of 10:05, 4 December 2014 by Jmli (talk | contribs)

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**Comparison of processes before and after the change of showerhead in December 2014**
Process	Before			After
Process	Wafer ID	Comment	SEM images	Wafer ID	Comment	SEM images
rebe g4-14 black silicon recipe	S004592	Wafer centre		S004592	Wafer centre
rebe g4-14 black silicon recipe	S004592	Wafer edge		S004592	Wafer edge

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