Specific Process Knowledge
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Sample processing:
- Clean the sample
- Drying Samples
Make a layer on the sample | ||
---|---|---|
Thermal Oxide growth | ||
Thin Film deposition | ||
Sputter deposition | ||
Thermal deposition | ||
E-beam evaporation | ||
CVD | ||
LPCVD | ||
PECVD | ||
Coating | ||
Spin coating | ||
Spray coating | ||
Electroplating | ||
Epitaxial growth |
- Thermal treatment of the sample
- Make a mask on the sample
- Lithography
- Imprinting
- Transfer pattern into the sample
- Wet etch
- Dry etch
- Lift-off
- Direct structure definition
- Imprinting
- LASER machining
- Lithographic definition
- Polymer Injection molding
- Bonding samples together
- Characterize the sample
- Back end of the sample
- Chip/die mounting
- Wire bonding
- Dicing