Specific Process Knowledge/Characterization/Thickness Measurer

From LabAdviser

This is a micrometer-screw.

The Thickness measurer in Cleanroom 3

It measures with an accurracy within a few µm. The ragnge is from a few µm up to 5mm Measure the wafer in the box next to the meter.If ok other wafers can be measured. There is a calibration device by the DEKTAK. It is calibrated at 750µm