Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/fluence
Fluence
The fluence produces by a laser is, by definition, the energy delivered by a laser pulse () per surface unit () and it is given in J/cm2.
The function is defined as :
Where () is the average power and is measured with the laser sensor power measurement and the repetion rate () is set in the settings.
The fluence is therefore determinate as such :