Specific Process Knowledge/Characterization

Choose topic

• Sample imaging
• Topographic measurement
• Stress measurement
• Measurement of film thickness and optical constants
• Wafer thickness measurement - writer: Yvonne
• Element analysis - writer: Jonas
• Hydrophobicity measurement - writer: Jonas
• Resistivity measurement - writer: Jan
• Other electrical measurements - writer: Jan

Choose equipment

SEM: Scanning Electron Microscopy - writer: Jonas

• FEI SEM
• LEO SEM
• JEOL SEM

AFM: Atomic Force Microscopy - writer: Berit - reviewer: Flemming

• Nanoman - AFM

Profiler - writer: Berit

• Dektak 8 stylus profiler
• Tencor stylus profiler

Optical characterization

• Ellipsometer
• Filmtek 4000
• Prism Coupler

SIMS: Secondary Ion Mass Spectrometry

• Atomika SIMS