Specific Process Knowledge/Lithography/CSAR
CSAR
| Spin Coat of AllResist SX 6200/2, TIGRE, 09-04-2014 | ||
|---|---|---|
| Spin Coater | Process Parameters | Comments |
| Spin Coater Manual, LabSpin, A-5 | 60 sec at various spin speed. Acceleration 4000 s-2, softbake 5 min at 150 deg Celcius | Resist poured directly from bottle |
| AllResist SX 6200/2 spinning on Manual Spinner LabSpin A-5, TIGRE, 09-04-2014 | ||||||
|---|---|---|---|---|---|---|
| Spin Speed [rpm] | Acceleration [1/s2] | Spin Time [s] | Thickness [nm] | St Dev | ||
| 2000 | 4000 | 60 | ||||
| 3000 | 4000 | 60 | ||||
| 4000 | 4000 | 60 | ||||
| 5000 | 4000 | 60 | ||||
| 6000 | 4000 | 60 | ||||
| 7000 | 4000 | 60 | ||||