Specific Process Knowledge/Back-end processing/Polishing machine
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Polisher/Lapper 
The Logitech PM5 Polisher/Lapper is for thinning down wafers and other substrates.
The user manual, user APV(s), technical information and contact information can be found in LabManager:
The Logitech PM5 Polisher/Lapper in LabManager
| Equipment | Equipment 1 | Equipment 2 | |
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| Purpose |
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| Performance | Response 1 |
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| Response 2 |
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| Process parameter range | Parameter 1 |
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| Parameter 2 |
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| Substrates | Batch size |
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| Allowed materials |
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