Specific Process Knowledge/Thin film deposition/Deposition of Nickel/Stress Wordentec Ni films
Stess in Wordentec deposited Nickel films
Nickel can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment.
| Rate | Comment | Stress | |
|---|---|---|---|
| Batch size |
|
|
|
| R | R | R
| |
| 1 | 1 | 1
| |
| D | 2 | 1 | A |
| Comment | . | O |