Specific Process Knowledge/Thin film deposition/Deposition of Nickel/Stress Wordentec Ni films
Stess in Wordentec deposited Nickel films
Nickel can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment.
Rate | Comment | Stress | |
---|---|---|---|
Batch size |
|
|
|
R | R | R
| |
1 | 1 | 1
| |
D | 2 | 1 | A |
Comment | . | O |