Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy

Nanoman

Nanoman: positioned in cleanroom 4 - glass cage no. 4

The AFM: Nanoman is a product of Veeco Instruments.

To get some product information from the vendor take a look at Veeco's homepage [1]

A rough overview of the performance of the AFM: Nanoman

Purpose	Profiler for measuring micro structures.	Single point profiles Wafer mapping Stress measurements by measuring wafer bow Surface roughness on a line scan
Performance	Scan range xy	Line scan x: 50 µm to 200 mm
.	Scan range z	50 Å to 262 µm
.	Resolution xy	down to 0.067 µm
.	Resolution z	1Å, 10Å or 20Å
.	Max. scan depth as a function of trench width W	1.2(W[µm]-5µm)
Hardware settings	Tip radius	5 µm 45o cone
Substrates	Substrate size	up to 8"
.	Substrate material allowed	In principle all materials