Specific Process Knowledge/Characterization/Thickness Measurer
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Revision as of 16:41, 7 January 2008 by 192.38.87.69 (talk) (New page: This is a micrometer-screw. It measures with an accurracy within a few µm. Measure the wafer in the box next to the meter.If ok other wafers can be measured. There is a calibration by the...)
This is a micrometer-screw. It measures with an accurracy within a few µm. Measure the wafer in the box next to the meter.If ok other wafers can be measured. There is a calibration by the DEKTAK. It is calibrated at about 750µ