File:SU8-SU8iso R13.jpg
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SU-8 etched with SU8iso, anisotropy 0.3, etch rate ~170nm/min, antimony surface layer concentration <2.75%
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 09:04, 4 November 2013 | | 1,024 × 943 (133 KB) | Khara (talk | contribs) | SU-8 etched with SU8iso, anisotropy 0.3, etch rate ~170nm/min, antimony surface layer concentration <2.75% |
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