Specific Process Knowledge/Etch/Etching of Aluminium

Etching of Aluminium

Etching of aluminium is done wet at Danchip. We have two different solutions:

1. H${}_2$O:H${}_3$PO${}_4$ 1:2 at 50 ^oC
2. Pre-mixed etch solution: PES 77-19-04 at 20 ^oC