File:Process Flow Trilayer Ebeam Resist.docx
Process_Flow_Trilayer_Ebeam_Resist.docx (file size: 208 KB, MIME type: application/vnd.openxmlformats-officedocument.wordprocessingml.document)
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Process flow for MMA/Ge/ZEP7000 trilayer stack for proximity-error correction-free e-beam writing.
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| Date/Time | Dimensions | User | Comment | |
|---|---|---|---|---|
| current | 11:57, 6 August 2013 | (208 KB) | Tigre (talk | contribs) | Process flow for MMA/Ge/ZEP7000 trilayer stack for proximity-error correction-free e-beam writing. |
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