Specific Process Knowledge/Characterization/KLA-Tencor Surfscan 6420
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Revision as of 11:43, 3 June 2013 by Pevo (talk | contribs) (→Overview of the performance of the Surfscan 6420 and some process related parameters)
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KLA-Tencor Surfscan 6420
The KLA-Tencor is a surface analysis instrument for detecting, couting and sizing of particles, i.e. light point defects. A broad range of particles size from 0.15 µm to greater than 3 µm can be measured on a polished silicon surface with or without or epitaxial layers. The particle contamination in thin films like nitride, thermal oxide and polymer or resist can also be inspected. The system will remove small surface roughness so it will not count as particle contaminations.
The user manual and contact information can be found in LabManager:
http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=changestatus&page_id=50
Process information
Nor process information yet.
Purpose |
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Performance | Particles size |
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Througput |
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Repeatbility |
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Process parameter range | Process Temperature |
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Substrates | Batch size |
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Substrate materials allowed |
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