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Specific Process Knowledge/Lithography/UVLithography

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< Specific Process Knowledge | Lithography
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Process Resist Type Comment 1 Comment 2 Comment 3
Lift off NLOF AA BB CC
Dry Etch DD
  • DD1
  • DD2
 EE FF GG
Wet Etch HH
  • HH1
  • HH2
 II JJ KK



Resist Comments Pre-treatment Resist Coating Exposure Baking Developing Stripping, Lift-off
AA AA AA AA AA AA AA AA
BB BB BB BB BB BB BB BB
CC CC CC CC CC CC CC CC


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