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18:46, 13 October 2026 Eves talk contribs created page File:Eves XRR V3Si with 30W RF PC1 20260915.png (File uploaded with MsUpload)
18:46, 13 October 2026 Eves talk contribs uploaded File:Eves XRR V3Si with 30W RF PC1 20260915.png (File uploaded with MsUpload)
18:45, 13 October 2026 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Vanadium Silicide/V3Si RF-DC Co-Sputtering in Cluster Lesker PC1 (Created page with "This page was written by Evgeniy Shkondin, DTU Nanolab, unless otherwise stated. All images and photographs on this page belong to DTU Nanolab. The fabrication and characterization described below were conducted in 2026 by Evgeniy Shkondin, DTU Nanolab. =Vanadium Silicide RF-DC Co-Sputtering= This document presents the results of vanadium silicide (V3Si) deposition by RF-DC co-sputtering in the Sputter-System...")
18:22, 13 October 2026 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of V3Si (Created page with "{{cc-nanolab}} '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_V3Si&action=submit click here]'''")
18:03, 13 October 2026 Eves talk contribs created page File:Eves XRR 400C Vanadium Nitride reactive p-DC PC1 src5.png (File uploaded with MsUpload)
18:03, 13 October 2026 Eves talk contribs uploaded File:Eves XRR 400C Vanadium Nitride reactive p-DC PC1 src5.png (File uploaded with MsUpload)
18:03, 13 October 2026 Eves talk contribs created page File:Eves XRR 600C Vanadium Nitride reactive p-DC PC1 src5.png (File uploaded with MsUpload)
18:03, 13 October 2026 Eves talk contribs uploaded File:Eves XRR 600C Vanadium Nitride reactive p-DC PC1 src5.png (File uploaded with MsUpload)
18:02, 13 October 2026 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Vanadium Nitride/VN Reactive Sputtering in Cluster Lesker PC1 (Created page with "This page was written by Evgeniy Shkondin, DTU Nanolab, unless otherwise stated. All images and photographs on this page belong to DTU Nanolab. The fabrication and characterization described below were carried out in 2026 by Evgeniy Shkondin, DTU Nanolab. =Vanadium Nitride p-DC Reactive Sputtering= This document presents the development and characterization of vanadium nitride (VNx) thin films deposited by react...")
17:55, 13 October 2026 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Vanadium Nitride (Created page with "{{cc-nanolab}} '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Tungsten_Nitride&action=submit click here]''' =Vanadium Nitride (WNx)= Tungsten nitride (WNₓ, commonly W₂N or δ‑WN) is a refractory ceramic that combines very high melting temperature, extreme hardness, chemical inertness, a...")
09:25, 13 October 2026 User account Odylan talk contribs was created automatically
06:02, 10 October 2026 User account S211548 talk contribs was created automatically
12:03, 9 October 2026 User account S243577 talk contribs was created automatically
09:22, 9 October 2026 Thes talk contribs created page File:Change4.png (File uploaded with MsUpload)
09:22, 9 October 2026 Thes talk contribs uploaded File:Change4.png (File uploaded with MsUpload)
07:09, 9 October 2026 Thes talk contribs created page File:Change2.png (File uploaded with MsUpload)
07:09, 9 October 2026 Thes talk contribs uploaded File:Change2.png (File uploaded with MsUpload)
07:09, 9 October 2026 Thes talk contribs created page File:Change1.png (File uploaded with MsUpload)
07:09, 9 October 2026 Thes talk contribs uploaded File:Change1.png (File uploaded with MsUpload)
07:09, 9 October 2026 Thes talk contribs created page File:Change3.png (File uploaded with MsUpload)
07:09, 9 October 2026 Thes talk contribs uploaded File:Change3.png (File uploaded with MsUpload)
06:56, 9 October 2026 Thes talk contribs created page LabAdviser/LabManager/Guide - change orderlines (Created page with "==Guide - change orderlines==")
14:04, 7 October 2026 User account Qizli talk contribs was created automatically
12:22, 7 October 2026 User account Davmo talk contribs was created automatically
10:55, 6 October 2026 User account Cceqv talk contribs was created automatically
16:46, 5 October 2026 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/ALD2 (PEALD)/TiN deposition using ALD2/old (Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/ALD2_(PEALD)/TiN_deposition_using_ALD2 click here]''' ''This page is written by DTU Nanolab internal'' =General information= As already mentioned in the general ALD2 (PEALD) page, oxides and nitrides cannot be deposited at the same time. Since deposition of aluminum nitride requ...")
16:24, 5 October 2026 Eves talk contribs created page File:Eves TiN plasma ALD2 SE 450C 4000cycles p3 20230427.png (File uploaded with MsUpload)
16:24, 5 October 2026 Eves talk contribs uploaded File:Eves TiN plasma ALD2 SE 450C 4000cycles p3 20230427.png (File uploaded with MsUpload)
16:23, 5 October 2026 Eves talk contribs created page File:Eves TiN plasma ALD2 psi delta par 4000 20220617.png (File uploaded with MsUpload)
16:23, 5 October 2026 Eves talk contribs uploaded File:Eves TiN plasma ALD2 psi delta par 4000 20220617.png (File uploaded with MsUpload)
16:22, 5 October 2026 Eves talk contribs created page File:Eves TiN plasma ALD2 psi delta par 3000 20220617.png (File uploaded with MsUpload)
16:22, 5 October 2026 Eves talk contribs uploaded File:Eves TiN plasma ALD2 psi delta par 3000 20220617.png (File uploaded with MsUpload)
16:22, 5 October 2026 Eves talk contribs created page File:Eves TiN plasma ALD2 psi delta par 2000 20220617.png (File uploaded with MsUpload)
16:22, 5 October 2026 Eves talk contribs uploaded File:Eves TiN plasma ALD2 psi delta par 2000 20220617.png (File uploaded with MsUpload)
16:22, 5 October 2026 Eves talk contribs created page File:Eves TiN plasma ALD2 psi delta par 1000 20220617.png (File uploaded with MsUpload)
16:22, 5 October 2026 Eves talk contribs uploaded File:Eves TiN plasma ALD2 psi delta par 1000 20220617.png (File uploaded with MsUpload)
16:22, 5 October 2026 Eves talk contribs created page File:Eves TiN plasma ALD2 psi delta 4000 20220617.png (File uploaded with MsUpload)
16:22, 5 October 2026 Eves talk contribs uploaded File:Eves TiN plasma ALD2 psi delta 4000 20220617.png (File uploaded with MsUpload)
16:22, 5 October 2026 Eves talk contribs created page File:Eves TiN plasma ALD2 psi delta 3000 20220617.png (File uploaded with MsUpload)
16:22, 5 October 2026 Eves talk contribs uploaded File:Eves TiN plasma ALD2 psi delta 3000 20220617.png (File uploaded with MsUpload)
16:22, 5 October 2026 Eves talk contribs created page File:Eves TiN plasma ALD2 psi delta 2000 20220617.png (File uploaded with MsUpload)
16:22, 5 October 2026 Eves talk contribs uploaded File:Eves TiN plasma ALD2 psi delta 2000 20220617.png (File uploaded with MsUpload)
16:22, 5 October 2026 Eves talk contribs created page File:Eves TiN plasma ALD2 psi delta 1000 20220617.png (File uploaded with MsUpload)
16:22, 5 October 2026 Eves talk contribs uploaded File:Eves TiN plasma ALD2 psi delta 1000 20220617.png (File uploaded with MsUpload)
16:18, 5 October 2026 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/ALD2 (PEALD)/TiN plasma deposition using ALD2 (Created page with " This page is written by Evgeniy Shkondin @DTU Nanolab if nothing else is stated. All images and photos on this page belongs to DTU Nanolab. The fabrication and characterization described below were conducted in 2021 by Evgeniy Shkondin, DTU Nanolab. Deposition of TiN is a standard, well explored ALD process. In any book where ALD is explained or scientific reviews on a subject, the TiN process is mentioned as a standard example...")
16:17, 5 October 2026 Eves talk contribs created page File:Eves TiN plasma ALD2 SE 450C 4000cycles p2 20230427.png (File uploaded with MsUpload)
16:17, 5 October 2026 Eves talk contribs uploaded File:Eves TiN plasma ALD2 SE 450C 4000cycles p2 20230427.png (File uploaded with MsUpload)
16:17, 5 October 2026 Eves talk contribs created page File:Eves TiN plasma ALD2 SE 450C 4000cycles p1 20230427.png (File uploaded with MsUpload)
16:17, 5 October 2026 Eves talk contribs uploaded File:Eves TiN plasma ALD2 SE 450C 4000cycles p1 20230427.png (File uploaded with MsUpload)
16:17, 5 October 2026 Eves talk contribs created page File:Eves TiN plasma ALD2 SE 450C 4000cycles 20230427.png (File uploaded with MsUpload)